Light confinement effect of nonspherical nanoscale solid immersion lenses
نویسندگان
چکیده
منابع مشابه
Light confinement effect of nonspherical nanoscale solid immersion lenses
We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characte...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2013
ISSN: 1932-5150
DOI: 10.1117/1.jmm.12.2.023015